About SPTS

SPTS Technologies, an Orbotech company, designs, manufactures, sells, and supports etch, PVD, CVD and MVD® capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.

Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, MOCVD and MVD®. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor and microelectronic device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents. Under agreement with SPP Technologies, Ltd., SPTS also offers APCVD solutions and a range of large batch vertical furnaces.

SPTS Technologies has been recognized by leading industry experts, government agencies, and Her Majesty the Queen, having received the Queen’s Award for Enterprise for International Trade in 2013 and 2017 and for Innovation in 2018. SPTS has also been given the prestigious Anchor Company status by the Welsh Government. Other accolades can be viewed on our Awards page



  • Inductively Coupled Plasma (ICP) etch of silicon, dielectrics and polymers
  • Deep Reactive Ion Etching (DRIE)
  • Dry Release Etch using HF vapor
  • Isotropic etching of silicon using xenon difluoride (XeF2)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)    
  • Physical Vapor Deposition (PVD)
  • Metal-organic Chemical Vapor Deposition (MOCVD)
  • Molecular Vapor Deposition (MVD®)


In August 2014, SPTS was acquired by Orbotech Ltd. (NASDAQ:ORBK), in a strategic move into the high growth areas of Advanced Packaging and micro-electro-mechanical systems (MEMS).

Orbotech Ltd. (NASDAQ:ORBK) is a global innovator of enabling technologies used to manufacture the world’s most sophisticated consumer and industrial electronic products. Orbotech is a leading provider of yield enhancement and production solutions for electronics reading, writing and connecting, used by manufacturers of printed circuit boards, flat panel displays, advanced packaging, micro-electro-mechanical systems (MEMS), RF devices, power semiconductors, and other electronic components. Orbotech’s solutions include automated optical inspection and shaping, direct imaging, laser drilling, Inkjet printing, array test and repair, yield management, and etch and deposition wafer process solutions. Today, virtually every electronic device in the world is produced using Orbotech systems. More information about Orbotech can be found at www.orbotech.com.


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