LPCVD/Diffusion

SPTS’s large batch vertical furnace products offer low temperature atmospheric and vacuum anneal solutions ideally suited LED anneals applications.

 

Benefits of SPTS LPCVD/Diffusion for LED manufacturing:

  • Ag anneal
    • Up to 5% better power efficiency
    • Superior post anneal reflectivity
    • Higher Lm/W
  • Epitaxial anneal
    • Achieved 4% reduction in Vf

Precise control of Ag surface to maximize reflectivity

 

Reflectivity optimisation with anneal temperature
Effect of anneal temperature on reflectivity

 

 

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