Acquisition of Tegal’s DRIE Product Line and its R&D Center in France Strengthens SPTS Development and Support Capabilities, while Expanding Technology Offerings for the DRIE Markets
Newport, United Kingdom, and Petaluma, California — 10 February, 2011 — SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch, deposition, and thermal processing equipment for the micro-device industry today announced it had completed the acquisition of the Deep Reactive Ion Etch (DRIE) and certain related assets from Tegal Corporation. In addition, the deal includes the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly-owned Tegal subsidiary formed by Tegal’s acquisition of Alcatel Micro Machining Systems’ DRIE assets in September 2008.
SPTS’ acquisition will include the Tegal DRIE product line (including 200™, 110™, 3200™ and 4200™ series), along with the Compact™ and Pluto development assets, intellectual property and process know-how. SPTS will provide continued global support to existing Tegal DRIE customers, and will integrate these technologies into its SPTS’ broad range of product offerings in etch, deposition and thermal technologies which it offers to served markets worldwide.
“We are delighted to add these world class DRIE offerings to the SPTS product line, broadening the technology solutions available to our customers worldwide”, said William Johnson, president and CEO of SPTS. “We look forward to enhancing the support for Tegal’s global customer base through our extensive service and support system, and to continue the leading-edge development activities of the team in Annecy, France.”
“The sale of the Tegal DRIE assets to SPTS secures our technology, team members, active joint development projects in France, and ensures continuation of our commitments to customers globally,” said Thomas Mika, president and CEO, Tegal Corporation. “This event represents another major step in Tegal’s transformation from semiconductor capital equipment supplier to its new role in providing green energy.” Tegal recently announced participation in the formation of sequel Power, a company engaged in large scale photovoltaic (PV)-based solar utilities.
About SPP Process Technology Systems
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and acquired assets of Aviza Technology. The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd., and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including R&D, data storage, MEMS and nanotechnology, advanced 3-D packaging, LEDs, and power integrated circuits for communications. For more information about SPTS, please visit www.spp-pts.com
About Tegal Corporation
Tegal is dedicated to the development and application of both proven and emerging technologies in the field of green energy. Through sequel Power, a newly-formed entity in which Tegal has a controlling voting interest, Tegal is now engaged in the promotion of solar power plant development projects worldwide, the development of self-sustaining businesses from such projects, including supporting, developing, building and operating solar photovoltaic fabrication facilities and solar farms and other non-PV based renewable energy projects. Headquartered in Petaluma, California, the company has more than 35 years of semiconductor capital equipment expertise and innovation in specialized technologies. Please visit us on the web at www.Tegal.com
Evelyn Tay Corporate Marketing Director
Tel: +65 8383-0393
Thomas R Mika President & Chief Executive Officer
Tel: +1 707 765-5630