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LPCVD / Diffusion

SPTS has over 40 years of experience in thermal processing. We offer both new and factory-certified remanufactured systems as well as custom system conversions to meet specific engineering requirements. SPTS’ production-proven vertical furnaces deliver superior process results, high productivity and the lowest cost of ownership (CoO).


Diverse low pressure chemical vapour deposition (LPCVD) diffusion process portfolio includes:

  • Wet/dry thermal oxide
  • LPCVD oxide (HTO)
  • Stoichiometric and stress controlled LPCVD Silicon nitride
  • Doped and undoped LPCVD polysilicon
  • Low temperature LPCVD SiGe
  • 100 to >1200°C anneal processes