SPTS has over 40 years of experience in thermal processing. We offer both new and factory-certified remanufactured systems as well as custom system conversions to meet specific engineering requirements. SPTS’ production-proven vertical furnaces deliver superior process results, high productivity and the lowest cost of ownership (CoO).
Products:
Diverse low pressure chemical vapour deposition (LPCVD) diffusion process portfolio includes:
- Wet/dry thermal oxide
- LPCVD oxide (HTO)
- Stoichiometric and stress controlled LPCVD Silicon nitride
- LPCVD TEOS
- Doped and undoped LPCVD polysilicon
- Low temperature LPCVD SiGe
- 100 to >1200°C anneal processes