Plasma Etch

Omega^® Etch Systems

SPTS offers advanced etch technologies for a wide range of applications within MEMS, Advanced Packaging, LEDs, high speed RF IC & power semiconductors.

Etch Technologies

• Pegasus Rapier (for Si DRIE & related oxide etches)
• ICP (for III-Vs, GaN, SixNy & polymers)
• APS (for oxides and SiC etch)