Monarch 25

The Monarch25 25-wafer batch process module is designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations.

Key Benefits

  • High throughput, high uptime 25-wafer batch processing
  • Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint
  • Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production

Available configurations:

  • c2L supports up to 3 process modules
  • fxP supports up to 6 process modules
  • Versalis capability enables other SPTS modules to be added to either platform if required

Product Images:

Primaxx fxP HF etch cluster system  Primaxx Monarch25 HF Etch Process Module

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