The Monarch25 25-wafer batch process module is designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations.
- High throughput, high uptime 25-wafer batch processing
- Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint
- Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production
- c2L supports up to 3 process modules
- fxP supports up to 6 process modules
- Versalis capability enables other SPTS modules to be added to either platform if required