uEtch

The uEtch is a single-wafer system specifically designed for university and small research laboratories.

Key Benefits

  • Fully integrated, compact system includes built-in HF gas cabinet
  • PLC controlled with multi-user features and extensive safety interlocks
  • Can process single whole wafers (100-200mm) or die on a carrier
  • HF vapor processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production

Product Images:

Primaxx uEtch with integrated HF supply cabinet  Primaxx uEtch HF etch module

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