MVD300 / MVD300E

Molecular Vapor Deposition (MVD®) is a highly reproducible vapor deposition alternative that is ideal for manufacturing applications.

Typical MEMS devices benefiting from MVD®) hydrophobic antistiction films include sensors, actuators, displays. RF switches, inkjets, and data storage devices. BioMEMS applications include wetting control in micro-fluidics (lab-on-a-chip, microplates), passivation on implantable devices — requiring biocompatible surface coatings, and devices requiring functionalized surface coatings (genome sequencing diagnostics).

MVD® is finding increasing use in production applications requiring moisture barriers, anti-corrosion coatings, or release layers for imprinting.

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

Features and Benefits

  • Batch processing for high throughput and small footprint
    • 200mm wafers (Pod loader or EFEM available)
    • 300mm wafers (EFEM enabled)
    • Singulated die on tape frames
    • Components on trays
    • Custom substrate fixturing available
  • Superior Cost of Ownership – low consumption and efficient utilization of precursors
  • Up to 4 Precursors
  • Integrated plasma surface treatment and chamber clean capability
  • Automated process sequence routines
  • Extensive self-diagnostic and data logging capability
  • Exceptional reliability
  • MVD and ALD-capable

Product Images

MVD300 MVD300E
MVD300 MVD300E

 

 

 

 

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