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About SPTS

SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment, providing advanced wafer processing technologies for the microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.

Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Watkins-Johnson, Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, APCVD and large batch vertical furnaces. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents.

ETCH

DEPOSITION

THERMAL

  • Inductively Coupled Plasma (ICP) etch of silicon, dielectrics and polymers

  • Deep Reactive Ion Etching (DRIE)

  • Dry Release Etch using HF vapour
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)

     
  • Physical Vapour Deposition (PVD)

  • Metal-organic Chemical Vapour Deposition (MOCVD)
  • Atmospheric Pressure Chemical vapour deposition (APCVD)

  • Diffusion and LPCVD furnaces