website analytics

About SPTS

SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment, providing advanced wafer processing technologies for the microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.

Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Watkins-Johnson, Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, APCVD and large batch vertical furnaces.

SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor and microelectronic device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents.




  • Inductively Coupled Plasma (ICP) etch of silicon, dielectrics and polymers

  • Deep Reactive Ion Etching (DRIE)

  • Dry Release Etch using HF vapour
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)

  • Physical Vapour Deposition (PVD)

  • Metal-organic Chemical Vapour Deposition (MOCVD)
  • Atmospheric Pressure Chemical vapour deposition (APCVD)

  • Diffusion and LPCVD furnaces



In August 2014, SPTS was acquired by Orbotech Ltd. (NASDAQ:ORBK), in a strategic move into the high growth areas of Advanced Packaging and micro-electro-mechanical systems (MEMS). Orbotech has been at the cutting edge of the electronics industry supply chain, as an innovator of enabling technologies used in the manufacture of the world’s most sophisticated consumer and industrial products, for over 30 years. The Company is a leading provider of yield-enhancing and production solutions, primarily for manufacturers of printed circuit boards, flat panel displays and other electronic components. Today, virtually every electronic device is produced using Orbotech technology. More information about Orbotech can be found at