Acquisition of Patented Hydrogen Fluoride Vapor Oxide Etch Technology Further Strengthens SPTS Leadership in MEMS Etching
Newport, United Kingdom, and Allentown, Pennsylvania — 3 February, 2011 — SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch, deposition, and thermal processing equipment for the semiconductor industry today announced it had completed the transfer of ownership of Primaxx Inc. from SPTS’ parent company, Sumitomo Precision Products (SPP) to SPTS in December 2010. The transfer strengthens SPTS’ etch technology portfolio that includes deep silicon etch, dielectric etch, inductively coupled plasma (ICP) etch, and now hydrogen fluoride (HF) vapor oxide etch. Primaxx is the leading provider of residue-free Micro Electro Mechanical Systems (MEMS) dry etch release products, based in Allentown, Pennsylvania.
Primaxx's patented HF vapor oxide etch technology uses a reduced pressure, gas phase, controlled anhydrous HF/Alcohol process to deliver residue-free "etch release" to remove the sacrificial silicon oxide layers used in MEMS manufacturing. Using HF, the sacrificial layer is etched with high selectivity relative to the structural layer.
“Considering the complementary products and synergies that already exist within both companies, bringing the Primaxx range of products and services into the SPTS family expands our customer offerings. It allows SPTS to provide an expanded manufacturing portfolio to our MEMS customers,” said William Johnson, president and CEO of SPTS. “In the long-term, SPTS will also explore opportunities to provide more integrated process schemes related to HF release technologies.”
Paul Hammond, president and CEO of Primaxx echoed the sentiment that with the transfer of ownership, Primaxx customers now benefit from the expanded service, support and distribution infrastructure of SPTS – with one consolidated contact point. “Through our parent company, Primaxx has already been working closely with SPTS; the acquisition is a natural progression in the relationship that immediately augments Primaxx’s sales and marketing capabilities,” said Hammond.
The Primaxx brand is planned to remain unchanged, while current process modules will eventually be consolidated with SPTS’ production-proven fxP wafer transport and control system.