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ICP Etch

The Omega® ICP process module uses a patented high density plasma source incorporating a radial coil design. The SPTS ICP process module is highly flexible and etches a wide range of materials including oxides, nitrides, polymers, low aspect ratio Si and metals. The ICP module is the market leader for compound semiconductor applications.

Typical materials:

  • GaAs
  • GaN
  • SixNy
  • BCB and Polyimide

 

SPTS ICP module
Omega fxp with ICP module

ICP Product Info: <click here>

APS Product Info: <click here>

Markets Served by ICP & APS: