ICP Etch

The Omega® ICP process module uses a patented high density plasma source incorporating a radial coil design. The SPTS ICP process module is highly flexible and etches a wide range of materials including oxides, nitrides, polymers, low aspect ratio Si and metals. The ICP module is the industry leader for compound semiconductor applications.

Typical materials:

  • GaAs
  • GaN
  • SixNy
  • BCB and Polyimide

Industries Served by ICP Etch:

Product Images:

SPTS Omega ICP

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