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e1

Built for simplicity, low cost of ownership and a small footprint, the Xactix® e1TM is the ideal solution for those seeking a low cost R&D xenon difluoride etching system. This table top etcher is ideal for universities and laboratories who do not need the performance of the Xactix® X4

Key Benefits

  • Low cost, simple & reliable
  • Great for working with small samples and wafers
  • Includes the etch unit, PC with keyboard and mouse, flat panel display, pump, power control box and manual

Xactix e1 for XeF2 vapour phase etching

SPTS e1 system