PVD for LED Manufacturing

SPTS offers PVD processes for the following LED Applications:

  • Advanced diffusion barriers
  • TSV metal seeds for LED wafer level packaging (WLP)

Benefits of SPTS PVD for LED Applications

  • Single wafer processing for improved yields
  • Reliable handling of fragile wafers
  • Compatible with 100mm-300mm wafers
  • Process flexibility

Related Product Information

Sigma PVD Product Information