MEMS

Micro Electro Mechanical Systems (MEMS) are microdevices used in a wide range of consumer, automotive, medical and industrial products, for example, smartphones, microphones in smart speakers, airbag sensors, gyroscopes, navigation systems, game consoles, and biomedical devices.

MEMS device manufacturing covers a wide range of applications and materials, where often bespoke processes are used to create life-enhancing devices.

Do you realize how often you encounter MEMS devices every day? Click on the thumbnail to see this infographic.

SPTS Technologies is the leader in the supply of enabling wafer processing systems to the MEMS community, serving the industry since the emergence of the first silicon MEMS in the 1990s.  

MEMS Processes: