Tencor^® Stylus Profilometers

Tencor^® Stylus Profilometers

KLA Instruments™ Alpha-Step^® stylus profilometers, Tencor^® P-series stylus profilometers and HRP^®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.