Chuck Assemblies
Chuck Assemblies
Chuck assemblies are an indispensable component of film thickness mapping systems. They offer a steadfast and safe environment where your wafers may be measured with consistent accuracy. The chuck assemblies from Filmetrics® are designed to accommodate wafers of different sizes. The chuck assemblies are made for 2”, 3”, 4”, 5”, 6”, 200mm, 300mm, and 450mm wafers. The F50, F54 and F60 chucks are manufactured with a high level of flexibility in terms of wafer sizes, adding to their ease-of use.
F50Chuck-100mm
F50 chuck assembly for 2″, 3″, & 4″ wafers.
F50Chuck-200mm
F50 chuck assembly for 4″, 5″, 6″, & 200mm wafers.
F50Chuck-300mm
F50 chuck assembly for 4″, 5″, 6″, 200mm, & 300mm wafers.
F50Chuck-450mm
F50 chuck assembly for 4″, 5″, 6″, 200mm, 300mm & 450mm wafers.
F50Chuck-Custom
Custom chucks are available for the F50, usually within four weeks
F60Chuck-200mm
F60 chuck assembly for 4″, 5″, 6″, & 200mm wafers.
F60Chuck-300mm
F60 chuck assembly for 4″, 5″, 6″,200mm, & 300mm wafers.