Film Thickness Standards
Film Thickness Standards
In the world of semiconductors, electrical measurement systems are crucial for measuring and monitoring sheet resistance and resistivity of thin films and bulk materials. For sheet resistance mapping systems, we offer 4-point probes with a variety of pin tip options, including different radii and spacing, to be used for various applications like metal measurements, implantation measurements or high impedance surface measurement. The 4-point probes we use provide a reliable and accurate way of measuring the sheet resistance of thin films and semiconductors. Replacement parts for our sheet resistance systems, including conditioning substrates and spare 4-point probes, are easily ordered online in our webstore. These replacement accessories can be used with both R50 and R54 4PP systems. With Filmetrics® 4-point probes, you can be assured that every measurement will be accurate and precise.
TS-Focus-SiO2-4-3100 Thickness Standard
SiO2-on-Si thickness standard with focus area, approximately 3100Å thick, 4 inch wafer.
$992.71
TS-Focus-SiO2-4-10000 Thickness Standard
SiO2-on-Si thickness standard with focus area, approximately 10000Å thick, 4 inch wafer.
$1044.36
TS-FusedSilica-.125mm Thickness Standard
Fused silica thickness standard, approximately 0.125mm thick.
$212.80
TS-Hardcoat-4µm Thickness Standard
Hardcoat-on-acrylic thickness standard, approximately 4µm thick, 2 inch diameter.
$212.80
TS-Hardcoat-Trans Thickness Standard
Hardcoat with transparent backside for transmittance measurements.
$212.80
TS-Parylene-8µm Thickness Standard
Parylene-on-silicon thickness standard, approximately 8µm thick, 23mm x 23mm.
$158.05
TS-Si-2-250µm Thickness Standard
Si thickness standard, approximately 250µm thick, 2″ wafer.
$141.52
TS-SiO2-4-7200 Thickness Standard
SiO2-on-Si thickness standard, approximately 7200Å thick, 4 inch wafer.
$457.62
TS-SiO2-4-7200-NIST Thickness Standard
NIST-traceable TS-SiO2-4-7200.
TS-SiO2-6-Multi Thickness Standard
SiO2-on-Si multiple thickness standard: 125Å, 250Å, 500Å, 1000Å, 5000Å, and 10000Å (actual thicknesses +/-10% nominal values, accurate to within 2Å), on 6 inch wafer.
TS-SS3-SiO2-2000 Thickness Standard
SiO2-on-Si thickness standard, approximately 2000Å thick, for SS-3 stage.
$560.92
TS-SS3-SiO2-8000 Thickness Standard
SiO2-on-Si thickness standard, approximately 8000Å thick, for SS-3 stage.
$560.92
TS-SS3-SiO2-16000 Thickness Standard
SiO2-on-Si thickness standard, approximately 16000Å thick, for SS-3 stage.
$560.92
TS-SiO2-2500nm-High-n-Glass Thickness Standard
SiO2-on-High-n-Glass thickness standard, approximately 2500nm thick, 2″ diameter.
$151.85
TS-SiO2-8000nm-High-n-Glass Thickness Standard
SiO2-on-High-n-Glass thickness standard, approximately 8000nm thick, 2″ diameter.
$151.85