Film Thickness Standards

Film Thickness Standards

In the world of semiconductors, electrical measurement systems are crucial for measuring and monitoring sheet resistance and resistivity of thin films and bulk materials. For sheet resistance mapping systems, we offer 4-point probes with a variety of pin tip options, including different radii and spacing, to be used for various applications like metal measurements, implantation measurements or high impedance surface measurement. The 4-point probes we use provide a reliable and accurate way of measuring the sheet resistance of thin films and semiconductors. Replacement parts for our sheet resistance systems, including conditioning substrates and spare 4-point probes, are easily ordered online in our webstore. These replacement accessories can be used with both R50 and R54 4PP systems. With Filmetrics® 4-point probes, you can be assured that every measurement will be accurate and precise.

TS-Focus-SiO2-4-3100 Thickness Standard

TS-Focus-SiO2-4-3100 Thickness Standard

SiO2-on-Si thickness standard with focus area, approximately 3100Å thick, 4 inch wafer.

$992.71

Purchase via the Accessories Store

TS-Focus-SiO2-4-10000 Thickness Standard

TS-Focus-SiO2-4-10000 Thickness Standard

SiO2-on-Si thickness standard with focus area, approximately 10000Å thick, 4 inch wafer.

$1044.36

Purchase via the Accessories Store

TS-FusedSilica-.125mm Thickness Standard

TS-FusedSilica-.125mm Thickness Standard

Fused silica thickness standard, approximately 0.125mm thick.

$212.80

Purchase via the Accessories Store

TS-Hardcoat-4µm Thickness Standard

TS-Hardcoat-4µm Thickness Standard

Hardcoat-on-acrylic thickness standard, approximately 4µm thick, 2 inch diameter.

$212.80

Purchase via the Accessories Store

TS-Hardcoat-Trans Thickness Standard

TS-Hardcoat-Trans Thickness Standard

Hardcoat with transparent backside for transmittance measurements.

$212.80

Purchase via the Accessories Store

TS-Parylene-8µm Thickness Standard

TS-Parylene-8µm Thickness Standard

Parylene-on-silicon thickness standard, approximately 8µm thick, 23mm x 23mm.

$158.05

Purchase via the Accessories Store

TS-Si-2-250µm Thickness Standrd

TS-Si-2-250µm Thickness Standard

Si thickness standard, approximately 250µm thick, 2″ wafer.

$141.52

Purchase via the Accessories Store

TS-SiO2-4-7200 Thickness Standard

TS-SiO2-4-7200 Thickness Standard

SiO2-on-Si thickness standard, approximately 7200Å thick, 4 inch wafer.

$457.62

Purchase via the Accessories Store

TS-SiO2-4-7200-NIST Thickness Standard

TS-SiO2-4-7200-NIST Thickness Standard

NIST-traceable TS-SiO2-4-7200.

TS-SiO2-6-Multi Thickness Standard

TS-SiO2-6-Multi Thickness Standard

SiO2-on-Si multiple thickness standard: 125Å, 250Å, 500Å, 1000Å, 5000Å, and 10000Å (actual thicknesses +/-10% nominal values, accurate to within 2Å), on 6 inch wafer.

TS-SS3-SiO2-2000 Thickness Standard

TS-SS3-SiO2-2000 Thickness Standard

SiO2-on-Si thickness standard, approximately 2000Å thick, for SS-3 stage.

$560.92

Purchase via the Accessories Store

TS-SS3-SiO2-8000 Thickness Standard

TS-SS3-SiO2-8000 Thickness Standard

SiO2-on-Si thickness standard, approximately 8000Å thick, for SS-3 stage.

$560.92

Purchase via the Accessories Store

TS-SS3-SiO2-16000 Thickness Standard

TS-SS3-SiO2-16000 Thickness Standard

SiO2-on-Si thickness standard, approximately 16000Å thick, for SS-3 stage.

$560.92

Purchase via the Accessories Store

TS-SiO2-2500nm-High-n-Glass Thickness Standard

TS-SiO2-2500nm-High-n-Glass Thickness Standard

SiO2-on-High-n-Glass thickness standard, approximately 2500nm thick, 2″ diameter.

$151.85

Purchase via the Accessories Store

TS-SiO2-8000nm-High-n-Glass Thickness Standard

TS-SiO2-8000nm-High-n-Glass Thickness Standard

SiO2-on-High-n-Glass thickness standard, approximately 8000nm thick, 2″ diameter.

$151.85

Purchase via the Accessories Store

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