產品

SPTS 供應的半導體晶圓加工系統適用於量產、研發及試驗生產環境，而且可以在許多晶圓處理平台上使用。所服務的市場包含先進封裝、MEMS、LED、功率半導體和高速 RF-IC。

提供的技術及工藝解決方案包含：

單晶圓平台

SPTS 的 ICP、DRIE、PECVD、PVD 及 MOCVD 模組適用於 3 種晶圓處理平台：

  • fxP® - 100 至 300mm 晶圓尺寸。支援蝕刻、PVD、PECVD、MOCVD 及 HF 釋放模組
  • c2L® - 3" 至 200mm 晶圓尺寸。支援蝕刻、PVD、PECVD、MOCVD 及 HF 釋放模組
  • LPX - 3" 至 200mm 晶圓尺寸。僅支援蝕刻及 PECVD 模組

按一下此處以瞭解詳細資訊

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