LPCVD / 扩散

根据与SPP技术有限公司(SPT)的协议,SPTS提供一系列大型立式炉(LPCVD)和APCVD系统。我们能够提供全新的和经过SPT工厂认证的翻新炉管,包括客户端设备改造,以满足特定的工程要求。经量产验证的立式炉管可提供优异的结果、高生产率和最低的拥有成本(CoO)。

多种类低压化学气相沉积(LPCVD)扩散工艺组合包括:

  • 干/湿热氧化硅
  • LPCVD氧化硅(HTO)
  • 化学计量和应力控制的LPCVD氮化硅
  • LPCVD TEOS
  • 掺杂和未掺杂LPCVD多晶硅
  • 低温LPCVD SiGe
  • 100至>1200°C退火工艺

LPCVD服务的市场:

AVP / RVP

AVP / RVP

The AVP/RVP vertical batch furnace delivers superior process results, the lowest cost of ownership (CoO)...

阅读更多
RVP-300plus

RVP-300plus

The RVP-300plus vertical batch furnace is a flexible platform for...

阅读更多

Inquiry about: LPCVD / 扩散

Please provide your name
Please provide your name
Please provide your email address
Please provide your telephone number
Please provide your job title
Please provide your company name
Please enter your message
Please confirm that you have read and agree to the privacy policy

Privacy Policy

×