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  • Tucson, Arizona, USA
  • JW Marriott Starr Pass Resort

KLA will be exhibiting at CS MANTECH, being held on the 20-23 May 2024. 

KLA will be presenting two technical papers:

  • "Optimisation of AlScN etch process for different Scandium percentage ensuring minimum bottom electrode loss" (Samira Kazemi,  Session 3.1, Tuesday 2:05pm)
  • "Plasma Dicing for High Yield SiC Singulation" (Alex Croot, Session 3.1, Tuesday, 2:25pm)

CS MANTECH is a not-for-profit organization whose focus is to provide a forum for members of the compound semiconductor community to exchange and discuss new ideas to better serve the public in general. They accomplish this through an annual international conference on Compound Semiconductor Manufacturing Technology. The conference is comprised of technical papers, talks, workshops, and manufacturer exhibits and is open to anyone who is interested in the latest advances in compound semiconductor manufacturing and device technology.

For more information click here

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