产品

SPTS 提供适合批量生产、研发或试生产环境的半导体晶圆加工系统，这些系统可在一系列晶圆处理平台上使用。服务的市场包括先进封装、MEMS、LED、功率半导体和高速 RF-IC。

提供的技术和工艺解决方案包括：

 单晶圆平台

SPTS 的 ICP、DRIE、PECVD、PVD 和 MOCVD 模块可在 3 个晶圆处理平台上使用：

  • fxP® - 100 至 300mm 晶圆尺寸。支持蚀刻、PVD、PECVD、MOCVD 和 HF 释放模块
  • c2L® - 3" 至 200mm 晶圆尺寸。支持蚀刻、PVD、PECVD、MOCVD 和 HF 释放模块
  • LPX - 3" 至 200mm 晶圆尺寸。仅支持蚀刻和 PECVD 模块

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