MEMS

微机电系统 (MEMS) 是用于需求量不断增加的消费、汽车、医药和工业产品中的微型器件，例如智能手机、麦克风、安全气囊传感器、陀螺仪、导航系统、游戏机和生物医学设备。

MEMS 器件的制造涵盖了范围广泛的应用和材料，而其中定制工艺往往被用来制造可改善生活品质的设备。

您知道您每天使用 MEMS 设备的频率有多高吗？单击缩略图，查看相关信息。

自上世纪90年代第一台硅基微机电系统出现以来，SPTS Technologies是向MEMS业界提供晶圆加工系统的领导者。

应用于MEMS的相关工艺包括：

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