Under agreement with SPP Technologies, SPTS offers solutions for Atmospheric Pressure CVD of SiH4 or TEOS based dielectrics. These APCVD product...
Under agreement with SPP Technologies, Ltd., SPTS offers solutions for Atmospheric Pressure CVD of SiH4 or TEOS based dielectrics. These APCVD product line based on patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or undoped films with no transient film properties and uniform gap fill across the wafer.
Wafer transport is via a self-cleaning belt conveyor enabling excellent system reliability with the lowest CoO for dielectric gap-fill.
Factory-certified system re-manufacturing is available for all systems and multiple upgrade options ensure product longevity and extendibility.
The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.