SPTS is committed to providing world-class support to all our customers.

Our support packages are tailored to the specific needs of our customers and include equipment training, service and planned maintenance contracts, and rapid spares support.

To ensure you continue to get the best from your existing SPTS toolset, and benefit from our on-going product development, we offer a wide range of retrofittable product enhancements which can improve the processing capability and/or cost of ownership of older STS and Aviza equipment.

Global Services

Spares & Service

SPTS supports its customer base through a network of sales and service offices located throughout Asia, Europe and North America.

To order service or spares, please contact your local office, listed below.

UK & Europe  
UK +44 1633 414000
Northern Europe +44 1633 414000
Central Europe +49 351-260-6510 (Service)
+49 351-260-6520 (Spares)
Southern Europe +33 4-76-52-90-70


Asia Pacific  
Mainlaind China +86 21 3868 3705
Japan +81 6-6489-5848
Korea +82 31-889-7082
Malaysia +60 4403-2328
Singapore +65 6556-2327
Taiwan +886 3-575-3105


N America  +1 (415) 629-1371 (Technical Support) 
+1 (408) 914-8086 (Spares)

SPTS Equipment Manuals

Selected SPTS equipment manuals may be accessed here, with valid user ID and password.   To obtain your user ID and password, please contact your local SPTS sales/service office.

SPTS Manuals

Equipment Training

Provision of high quality equipment training ensures customers get the most from their SPTS toolset. To maintain small class sizes, space on each course is limited and assigned on first-come-first served basis.

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Process Training

SPTS offers Process Training on selected equipment to our customers to enable them to understand & optimize their processes, and get the best return on equipment investment.

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Applications Services

SPTS offer their customers ongoing Application Support from the point of initial installation, through the whole lifetime of your system.  Our customers will benefit from the expertise of our global team of Applications and Process Engineers who can help with optimizing processes and productivity.

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