LPCVD/擴散
根據與 SPP Technologies, Ltd. 所簽訂的協議,SPTS...
根據與 SPP Technologies, Ltd. 所簽訂的協議,SPTS提供一系列大批量立式爐(LPCVD)和APCVD系統。我們可以提供經原廠認證的全新再製造系統以及自訂系統轉換,來滿足特定工程設計需求。經過生產驗證的直立型爐管可以帶來出色的制程結果、高產量及最低成本 (CoO)。
APCVD產品線基於獲得專利的Watkins Johnson(WJ)線性噴射器技術,能夠精確,可重複地沉積摻雜或未摻雜的薄膜,而沒有瞬態薄膜特性,並且在晶圓上均勻地填充了間隙。僅提供工廠認證的翻新APCVD系統(基於WJ-999 / WJ1000 / WJ1500型號)。
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