APCVD
- WJ-999 - 3 个工艺腔,适合 TEOS 与(hydride)氢化物工艺
- WJ-1000 - 4 个工艺腔,适合 TEOS 与(hydride)氢化物工艺
- WJ-1500 - 4 个腔,仅适合 TEOS 工艺
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