Chip Scale Review: "Comparison between wet and dry silicon via reveal in 3D backside processing"

June 14, 2016

Full Article:

This paper compares imec's current wet chemical via reveal process of record, based on the selective TMAH chemistry, with SPTS’s dry etch via reveal, based on an SF plasma. State-of-the-art metrology has been used to image large arrays of revealed TSVs. Data on nail height control and uniformity, liner selectivity and surface roughness are presented and discussed.

Authors: Dave Thomas et al. (SPTS Technology) and Anne Jourdain et al. (imec)

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