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"Hollow silicon microneedle fabrication using advanced plasma etch technologies for applications in transdermal drug delivery" Chris Bolton et al.
First Published in Lab on a Chip (Royal Society of Chemistry), 2020,20, pp2788-2795
"A study of Integrated Circuit Dicing Tape when used in a Plasma Dicing Environment" H. Fulton et al
First published in IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol 10, Iss 4, pp.694-703 (April 2020)
DOI: 10.1109/TCPMT.2020.2966724
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http://imapsource.org/doi/10.4071/2380-4505-2018.1.000718
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