"Optimization of Low Temperature PECVD Dielectric Stacks for Via Reveal Passivation" K. Crook etc al
(IWLPC 2020)
(IWLPC 2020)
(ECTC2020)
First Published in Lab on a Chip (Royal Society of Chemistry), 2020,20, pp2788-2795
First published in IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol 10, Iss 4, pp.694-703 (April 2020)
DOI: 10.1109/TCPMT.2020.2966724
(Journal of Microelectromechanical Systems. Volume: 28 , Issue: 3 , pp432-440, June 2019 )
(ECTC2018)
(IMAPS 2018)
http://imapsource.org/doi/10.4071/2380-4505-2018.1.000718
(iMAPS MINAPAD 2017)
(ECTC 2017)
(ECTC2016)
(EPTC 2015)
(IWLPC 2015)
(ASME InterPACK2015)
(CS Mantech 2015)
(ASMC 2015)
(IEEE Sensors, Vol 15 No 3, pp1849-1857, Mar2015)
(IWLPC2014)
(SMTA Pan Pacific Symposium Conference 2014)
(MEMS2014)
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