PECVD

等离子体增强化学气相沉积（PECVD）是一种利用等离子体中的能量在晶圆表面引发反应的过程，而这些反应在传统的CVD中需要更高的温度。沉积过程中的高能离子轰击也能改善薄膜的电学和机械性能。

Delta 沉积系统

SPTS的Delta-PECVD系统广泛应用于MEMS、化合物半导体和先进封装领域，特别是在需要低工艺温度的应用中

Delta® 沉积系统

Delta® 沉积系统

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