Delta® 沉积系统 Delta® 沉积系统

Delta® 沉积系统

SPTS的Delta-PECVD系统广泛应用于MEMS、化合物半导体和先进封装领域，特别是在需要低工艺温度的应用中。

主要优势：

  • 晶圆尺寸从75mm到300mm
  • 径向对称气流，实现了卓越的片内（WIW）均匀性
  • 多达10条气体管路和可选的主板控制液体输送系统
  • 用于应力调整的混频等离子体能力
  • 用于关键低温[<175°C]封装应用的动态加热盘冷却
  • 单片和多片式预加热腔体可选，用于对敏感衬底进行除气处理

PECVD 服务的市场：

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