LPCVD / 扩散
LPCVD /...
根据与SPP技术有限公司（SPT）的协议，SPTS提供一系列大型立式炉（LPCVD）和APCVD系统。我们能够提供全新的和经过SPT工厂认证的翻新炉管，包括客户端设备改造，以满足特定的工程要求。经量产验证的立式炉管可提供优异的结果、高生产率和最低的拥有成本（CoO）。
APCVD产品线基于专利的Watkins-Johnson（WJ）线性注入技术，能够精确、可重复地沉积掺杂或未掺杂薄膜，且无瞬态薄膜特性，且整个晶圆内均匀的孔洞填充。目前只有经过工厂认证的翻新APCVD系统（基于WJ-999/WJ1000/WJ1500型号）可用。
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