金属沉积

Sigma® 金属沉积系统

Sigma 产品系列支持 100mm 至 300mm 的晶圆尺寸,沉积技术覆盖了传统 的PVD 到 MOCVD 工艺。

金属沉积技术

  • 标准 PVD – 传统溅镀模块,适合填孔能力要求不高的特征图形
  • 高腔 Hi-Fill (AHF) PVD – 电离溅镀源,适合沉积到高深宽比的特征图形

PVD 服务的市场

Sigma® deposition systems

Sigma® deposition systems

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through...

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