Capacity upgrades reconfigure the original system for different wafer sizes to increase a customer’s capacity, or change to different application

Examples include:

  • Platform and module size conversions to meet FAB wafer size changes
  • Full system applications changes, e.g. PVD FSM to BSM
  • Conversions for different FAB load conditions, e.g. module change materials, PVD Ti to PVD Al


Inquiry about: Capacity

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