Monarch 3

The Monarch 3 is a compact module includes a 3-wafer process chamber, and is designed for research laboratory and small volume production environments.

Key Benefits

  • An integrated Panel PC, with on-board electronics minimizes cleanroom footprint
  • Third generation process chamber has been designed for easy wafer size changes and maintenance
  • Wafer loading options include a semi-automatic 3-wafer loader with load lock, and various cluster-based configurations


Inquiry about: Primaxx® Monarch 3

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