Low Temp CVD for MEMS
Low temp Plasma Enhanced Chemical Vapor Deposition (PECVD) solutions for depositing uniform and stable SiN and SiO films for MEMS devices at temperatures <200°C.
下载Many micro electromechanical systems (MEMS) contain materials such as polymers, magnetic layers or bonding adhesives, whose properties are degraded by high temperatures. In such cases the manufacturing process must be tailored to maintain a thermal threshold typically below 200°C to avoid affecting device performance and yield.
Plasma enhanced chemical vapour deposition (PECVD) is a commonly used process for depositing thin dielectric films. In traditional MEMS manufacturing, PECVD dielectric films are used for hard masks, sacrificial layers, mechanical or etch stop layers and passivation, using deposition temperatures typically 350°C – 450°C.
Emerging MEMS applications demanding low temperature (<200°C) PECVD processes include; magnetic sensor passivation for magnetometers, anti-reflective coatings on polymer based micro-optics , via-last TSV dielectric isolation layers for MEMS wafer level packaging, and bow compensation layers for thinned silicon.
By re-engineering system hardware and processes, SPTS Delta™ PECVD systems produce uniform and stable SiN and SiO film properties at deposition temperatures as low as 100°C.
Mobile phone compass application uses internal magnetometer to sense direction.
Active platen cooling in the PECVD chamber allows low temperature control whilst enabling high deposition and chamber clean rates – critical for high system productivity. Provision of a wafer degas option allows outgassing substrates to be heated prior to the PECVD step, thereby preventing plasma instability and yield loss.
SPTS’s optimized low temperature PECVD processes produce SiO and SiN films with unrivalled stability and electrical isolation performance whilst both tensile and compressive films stresses can be provided. Film stresses can be controlled to +-5MPa wafer to wafer, a significant benefit when working with the fragile structures used in modern MEMS devices. With a range of films already proven in high volume manufacturing, SPTS leads the way in low temperature PECVD technology.
Information on this page contains forward looking information. For more information, click here.
Low temp Plasma Enhanced Chemical Vapor Deposition (PECVD) solutions for depositing uniform and stable SiN and SiO films for MEMS devices at temperatures <200°C.
下载The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.
This site uses Cookies. Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out.
This site uses Cookies. Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out.
You are using the DNT flag, so cookies related to preferences, statistics and marketing have been disabled.
Necessary cookies help make a website usable by enabling basic functions like page navigation and access to secure areas of the website. The website cannot function properly without these cookies.
Name | Provider | Purpose | Expiry |
---|---|---|---|
laravel_session | spts.com | Used internally to identify a user | 2 hours |
XSRF-TOKEN | spts.com | Used to protect against cross-site request forgery | 2 hours |
cookie_control | spts.com | Used to remember Cookie Consent preference | 2 hours |
download_details_id | spts.com | Used to remember that the gated form has been filled on downloads | 1 month |
_GRECAPTCHA | google.com | Used when presenting a CAPTCHA when filling out forms | Session |
player | player.vimeo.com | Required for Vimeo video player | 1 year |
vuid | player.vimeo.com | Required for Vimeo video player | 2 years |
OptanonConsent | player.vimeo.com | Required for Vimeo video player | 1 years |
vimeo_gdpr_optin | player.vimeo.com | Required for Vimeo video player | 10 years |
There are no first-party cookies being used for user preferences.
Name | Provider | Purpose | Expiry |
---|---|---|---|
_ga | spts.com | This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users | 2 years |
_gid | spts.com | This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users | 24 hours |
_ga_NFV3HF22VQ | spts.com | Used to persist session state | 2 years |
_gat_gtag_UA_15972496_3 | spts.com | Contains campaign related information | 90 days |
_hjid | hotjar.com | Hotjar cookie that is set when the customer first lands on a page with the Hotjar script. It is used to persist the Hotjar User ID, unique to that site on the browser. This ensures that behavior in subsequent visits to the same site will be attributed to the same user ID. | 1 year |
_hjAbsoluteSessionInProgress | hotjar.com | This cookie is used to detect the first pageview session of a user. This is a True/False flag set by the cookie. | 30 minutes |
_hjIncludedInPageviewSample | hotjar.com | This cookie is set to let Hotjar know whether that user is included in the data sampling defined by your site's pageview limit. | 30 minutes |
_hjFirstSeen | hotjar.com | This is set to identify a new user’s first session. It stores a true/false value, indicating whether this was the first time Hotjar saw this user. It is used by Recording filters to identify new user sessions. | Session |
hotjar.com | Hotjar can set other cookies under specific circumstances. For a full list, please see the full list here: https://help.hotjar.com/hc/en-us/articles/115011789248-Hotjar-Cookie-Information#cookies-set-by-the-hotjar-script |
There are no first-party marketing cookies being used.