Latest news

SPTS Signs Joint Development Program (JDP) for 300mm 3D-IC Application with Fraunhofer IZM ASSID

Fraunhofer ASSID center adds PECVD capability to 300mm device stacking line Newport, United Kingdom , 9 October, 2012— [SEMICON Europa] SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry...

Latest news

SPTS Debuts Low-Temperature PECVD Technology for 3D-IC

Low temperature dielectrics with degas capability addresses two post-TSV packaging challenges Newport, United Kingdom, 19 September 2012 – SPTS Technologies, a leading supplier of advanced wafer processing solutions for the global...

Latest news

SPTS Leading the Way in Via Reveal Etch Solutions

Process flexibility and unique end-point solution improve yields for post-TSV processing   ]Newport, United Kingdom AND SEMICON Taiwan, 5 Sept, 2012 – SPTS Technologies, a leading supplier of advanced wafer processing solutions for the...

Latest news

SPTS Announces Multi-System Orders for C2MI

Multiple Etch, CVD and Thermal Processing systems procured for TSV, MEMS and Bulk Acoustic Wave Manufacturing Newport, United Kingdom, and San Jose, California 9 July, 2012—SPTS Technologies, a supplier of advanced wafer processing solutions...

Latest news

SPTS Technologies Joins MEMS Consortium Led by Singapore's Institute of Microelectronics (IME)

Consortium to play key role in developing next-generation MEMS manufacturing processes Newport, United Kingdom, and Singapore, 21 June, 2012—SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor...

Latest news

SPTS Expands Chinese Customer Base with PVD Win

Physical Vapor Deposition (PVD) system to be deployed in China for compound semiconductor applications May 15, 2012 – SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related...

Latest news

SPTS Installs First Vapor HF Release Etch System in China

21 Mar 2012 – SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, today announced that it has commissioned its first vapor hydrogen fluoride (VHF) etch system in China....