AVP / RVP
The AVP/RVP vertical batch furnace delivers superior process results, the lowest cost of ownership (CoO)...
LPCVD / Diffusion
Under agreement with SPP Technologies, Ltd., SPTS offers a range of large batch vertical furnaces. We are able to offer both new and factory-certified re-manufactured systems as well as custom system conversions to meet specific engineering requirements. The production-proven vertical furnaces deliver superior process results, high productivity and the lowest cost of ownership (CoO).
Diverse low pressure chemical vapour deposition (LPCVD) diffusion process portfolio includes:
- Wet/dry thermal oxide
- LPCVD oxide (HTO)
- Stoichiometric and stress controlled LPCVD Silicon nitride
- LPCVD TEOS
- Doped and undoped LPCVD polysilicon
- Low temperature LPCVD SiGe
- 100 to >1200°C anneal processes
Market Served by LPCVD:
