Many MEMS devices, for example magnetometers found in mobile phones, have low temperature contraints during manufacturing. SPTS offers unique PECVD processes (at < 200°) for such applications. Click here to read more...
SPTS was the original Bosch Process licensee in 1994, shipping the first commercial system in the following year. Since that time, we have continuously improved DRIE process capability, and last month the company shipped its 1000th DRIE system. For more details, click here
Plasma dicing can offer many advantages over traditional blade dicing, reducing die damage and lost "real estate", while increasing throughput and die shape flexibility. Click here to see more....
SPTS offers a unique & patented “parameter ramping” technology, using its MorflexTM software, which allows continuous adjustment of the plasma conditions to maintain etch rate and a smooth sidewall profile for deep silicon etching.
SPTS is attending the following exhibitions and conferences in 2013:
Introduction to SPTS Technologies
Dr. Dave Thomas discusses SPTS' via reveal technologies at ECTC 2012
SPTS is presenting at Forum 'be flexible' 2013 being held at Fraunhofer EMFT in Munich from 20th-21st Nov 2013
SPTS Technologies is a leading manufacturer of etch, deposition and thermal processing equipment for the semiconductor industry.