imec - Deep Oxide Etch for Hyperspectral Imaging Filters
Case study showing how SPTS's Synapse etch module enabled the successful manufacturing of SiO2-metal oxide filter stacks, for use in hyperspectral imaging cameras
DownloadCase study showing how SPTS's Synapse etch module enabled the successful manufacturing of SiO2-metal oxide filter stacks, for use in hyperspectral imaging cameras
DownloadDuring COVID-19, SPTS implemented a remote support solution to enable the commissioning of a new etch system at Teledyne Micralyne when SPTS engineers could not be on-site.
DownloadSPTS worked with SK Hynix to increase productivity of their backside via reveal process used in high bandwidth memory chip manufacturing - Optimizing production yield and reducing cost of ownership
DownloadDownload this Case Study illustrating how SPTS's Si DRIE technology is used by imec for manufacturing neural probes for mapping brain activity.
DownloadIllustrates the results of a joint development project between SPTS and University of Swansea to create a process for volume production of silicon microneedles for biomedical applications.
DownloadDiscusses the introduction of blanket silicon etching to replace CMP, as part of a joint development project with imec to optimize a manufacturable "TSV-last" route for a multi-wafer stack.
DownloadDescribes how SPTS worked with Skyworks to significantly improve Mean Time Before Clean (MTBC) for a SiN etch step, used in the manufacturing of their GaAs RF devices.
DownloadInformation in these downloads may contain forward looking information. For more information, click here: www.spts.com/fls
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