Available on a range of wafer handling platforms, SPTS supplies etch, deposition and thermal systems for volume production, R&D or pilot production environments. Served markets include Advanced Packaging, MEMS, LEDs, Power Semiconductors, and High Speed RF-ICs.
Technologies and Process Solutions offered include:
Single Wafer Platforms
SPTS's ICP, DRIE, PECVD, PVD and MOCVD modules are available on 3 wafer handling platforms:
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