Available on a range of wafer handling platforms, SPTS supplies etch, deposition and thermal systems for volume production, R&D or pilot production environments. Served markets include MEMS, LEDs, advanced packaging, power semiconductors, and high speed RF IC.
Single Wafer Platforms
SPTS' ICP, DRIE, PECVD, PVD and MOCVD modules are available on 3 wafer handling platforms:
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