Via Reveal Processing
High productivity plasma etch processes with unique end-point detection used for post-TSV steps, to prepare the die for connection to other parts of the device.
Through-silicon via (TSV) technology is currently being implemented across a broad range of device types. TSV has the potential to reduce form-factors, increases performance and enable heterogeneous integration.
TSV etching, at depths typically in the 50-200µm range, requires the use of the Bosch process for best control over the wall profile and mask selectivity. Also critical is the via reveal process that exposes the TSV nodes for the subsequent redistribution layer (RDL) metallisation. To perform via reveal, the user grinds the wafer from the backside to a point some 10 to 15µm above the tips of the buried TSV’s. The same Si surface is then dry etched to expose the via tips and leave them proud of the Si surface by approximately 5µm – the “via reveal”.
High productivity plasma etch processes with unique end-point detection used for post-TSV steps, to prepare the die for connection to other parts of the device.
Download this datasheet explaining how dry blanket Si etching exhibits better control over the etch rate and uniformity, when compared to wet chemical approaches.
The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.
This site uses Cookies. Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out.
This site uses Cookies. Please click okay to accept use of cookies. If you do not want cookies to be set, please use the show details button to see options and de-select to opt-out.
You are using the DNT flag, so cookies related to preferences, statistics and marketing have been disabled.
Necessary cookies help make a website usable by enabling basic functions like page navigation and access to secure areas of the website. The website cannot function properly without these cookies.
Name | Provider | Purpose | Expiry |
---|---|---|---|
laravel_session | spts.com | Used internally to identify a user | 2 hours |
XSRF-TOKEN | spts.com | Used to protect against cross-site request forgery | 2 hours |
cookie_control | spts.com | Used to remember Cookie Consent preference | 2 hours |
download_details_id | spts.com | Used to remember that the gated form has been filled on downloads | 1 month |
_GRECAPTCHA | google.com | Used when presenting a CAPTCHA when filling out forms | Session |
player | player.vimeo.com | Required for Vimeo video player | 1 year |
vuid | player.vimeo.com | Required for Vimeo video player | 2 years |
OptanonConsent | player.vimeo.com | Required for Vimeo video player | 1 years |
vimeo_gdpr_optin | player.vimeo.com | Required for Vimeo video player | 10 years |
There are no first-party cookies being used for user preferences.
Name | Provider | Purpose | Expiry |
---|---|---|---|
_ga | spts.com | This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users | 2 years |
_gid | spts.com | This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users | 24 hours |
_ga_NFV3HF22VQ | spts.com | Used to persist session state | 2 years |
_gat_gtag_UA_15972496_3 | spts.com | Contains campaign related information | 90 days |
_hjid | hotjar.com | Hotjar cookie that is set when the customer first lands on a page with the Hotjar script. It is used to persist the Hotjar User ID, unique to that site on the browser. This ensures that behavior in subsequent visits to the same site will be attributed to the same user ID. | 1 year |
_hjAbsoluteSessionInProgress | hotjar.com | This cookie is used to detect the first pageview session of a user. This is a True/False flag set by the cookie. | 30 minutes |
_hjIncludedInPageviewSample | hotjar.com | This cookie is set to let Hotjar know whether that user is included in the data sampling defined by your site's pageview limit. | 30 minutes |
_hjFirstSeen | hotjar.com | This is set to identify a new user’s first session. It stores a true/false value, indicating whether this was the first time Hotjar saw this user. It is used by Recording filters to identify new user sessions. | Session |
hotjar.com | Hotjar can set other cookies under specific circumstances. For a full list, please see the full list here: https://help.hotjar.com/hc/en-us/articles/115011789248-Hotjar-Cookie-Information#cookies-set-by-the-hotjar-script |
There are no first-party marketing cookies being used.