Plasma Processes for Photonic Devices
Download this datasheet giving an overview of SPTS's etch and deposition processes used to manufacture a range of photonic products such as LEDS, optical waveguides, VCSELs and lasers.
DownloadSPTS draws on its extensive compound semiconductor experience to offer etch processes for materials such as GaP, GaN, InP, GaAs and AlGaN for optoelectronic devices such as LEDs, LASERs, VCSELs and modulators. As well as the light generating elements, SPTS can also provide capability for the rendering of lenses in a variety of media, including Si, SiOx, polymers & GaAs.
SPTS has solutions for etching low volatility materials, like SiOx and LiNbO3, used in the manufacture of optical waveguide structures. The same technology can be used for pre-patterning of sapphire substrates to maximise light output from LEDs.
As a leading supplier of silicon etch technology SPTS has decades of experience in both “switched” (Bosch-type processes) and “non-switched” silicon etching, which can be employed in silicon based PICs, microlenses and optical MEMS.
Download this datasheet giving an overview of SPTS's etch and deposition processes used to manufacture a range of photonic products such as LEDS, optical waveguides, VCSELs and lasers.
DownloadNew applications for VCSELs include proximity sensing for automotives and gesture/face recognition for consumer products and SPTS offers a range of processes for VCSEL manufacturing including ICP etch, PVD, and PECVD.
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