Low Temp CVD for MEMS
Low temp Plasma Enhanced Chemical Vapor Deposition (PECVD) solutions for depositing uniform and stable SiN and SiO films for MEMS devices at temperatures <200°C.下載
MEMS applications demand use a wide range of dielectric film types and requirements are becoming more stringent as MEMS devices become increasingly sophisticated. SPTS’s PECVD module offers SiO, SiN and amorphous silicon films tailored to meet the needs of MEMS manufacturers.
You are using the DNT flag, so cookies related to preferences, statistics and marketing have been disabled.
Necessary cookies help make a website usable by enabling basic functions like page navigation and access to secure areas of the website. The website cannot function properly without these cookies.
|laravel_session||spts.com||Used internally to identify a user||2 hours|
|XSRF-TOKEN||spts.com||Used to protect against cross-site request forgery||2 hours|
|cookie_control||spts.com||Used to remember Cookie Consent preference||2 hours|
|download_details_id||spts.com||Used to remember that the gated form has been filled on downloads||1 month|
|_GRECAPTCHA||google.com||Used when presenting a CAPTCHA when filling out forms||Session|
|player||player.vimeo.com||Required for Vimeo video player||1 year|
|vuid||player.vimeo.com||Required for Vimeo video player||2 years|
|OptanonConsent||player.vimeo.com||Required for Vimeo video player||1 years|
|vimeo_gdpr_optin||player.vimeo.com||Required for Vimeo video player||10 years|
There are no first-party cookies being used for user preferences.
|_ga||spts.com||This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users||2 years|
|_gid||spts.com||This cookie is set by Google Analytics for providing browsing statistics. This cookie is used to distinguish users||24 hours|
|_ga_NFV3HF22VQ||spts.com||Used to persist session state||2 years|
|_gat_gtag_UA_15972496_3||spts.com||Contains campaign related information||90 days|
|_hjid||hotjar.com||Hotjar cookie that is set when the customer first lands on a page with the Hotjar script. It is used to persist the Hotjar User ID, unique to that site on the browser. This ensures that behavior in subsequent visits to the same site will be attributed to the same user ID.||1 year|
|_hjAbsoluteSessionInProgress||hotjar.com||This cookie is used to detect the first pageview session of a user. This is a True/False flag set by the cookie.||30 minutes|
|_hjIncludedInPageviewSample||hotjar.com||This cookie is set to let Hotjar know whether that user is included in the data sampling defined by your site's pageview limit.||30 minutes|
|_hjFirstSeen||hotjar.com||This is set to identify a new user’s first session. It stores a true/false value, indicating whether this was the first time Hotjar saw this user. It is used by Recording filters to identify new user sessions.||Session|
|hotjar.com||Hotjar can set other cookies under specific circumstances. For a full list, please see the full list here: https://help.hotjar.com/hc/en-us/articles/115011789248-Hotjar-Cookie-Information#cookies-set-by-the-hotjar-script|
There are no first-party marketing cookies being used.